Surface Force in Electrostatic Type Microsensors and Microactuators
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Transactions of the Society of Instrument and Control Engineers
سال: 1994
ISSN: 0453-4654
DOI: 10.9746/sicetr1965.30.143